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Proceedings Paper

VUV wall stabilized argon arc discharge source
Author(s): Futian Li; Jianlin Cao; Bo Chen; Limin Qian; Lei Jin; Xingdan Chen
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Paper Abstract

10 kW and 2kw wall stabilized argon arc sources have been developed in this institute as VUV spectroradiometric standard sources. The stability and reproducibility are better than 0. 2. Plasma spectroscopic diagnostics shows that the plasma temperature is 12759 K and the electron density is 1. 36x1023 m3 when the arc current is 40 A and argon pressure is 1. 75x10S'' Pa. Richter method absolute method relative method and computer spectral line reconstruction technique were used for plasma diagnostics. Based on McPherson 2253 M5 normal incidence VUV monochromator a computer controlled VUV spectroradiometer was set up. Impurity gases such as N1COKr Owere put into 10 kW arc and several black body limited lines (BBLL) were produced from 100 to 250 nm. These lines were used to calibrate deuterium lamp as transfer standard. 1.

Paper Details

Date Published: 1 January 1991
PDF: 11 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23304
Show Author Affiliations
Futian Li, Changchun Institute of Optics and Fine Mechanics (China)
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Limin Qian, Changchun Institute of Optics and Fine Mechanics (China)
Lei Jin, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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