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Proceedings Paper

VUV wall stabilized argon arc discharge source
Author(s): Futian Li; Jianlin Cao; Bo Chen; Limin Qian; Lei Jin; Xingdan Chen
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Paper Details

Date Published: 1 January 1991
PDF: 11 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23304
Show Author Affiliations
Futian Li, Changchun Institute of Optics and Fine Mechanics (China)
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Limin Qian, Changchun Institute of Optics and Fine Mechanics (China)
Lei Jin, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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