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Proceedings Paper

Penning discharge VUV and soft x-ray source
Author(s): Jianlin Cao; Futian Li; Limin Qian; Bo Chen; Yueying Ma; Xingdan Chen
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Paper Details

Date Published: 1 January 1991
PDF: 7 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23303
Show Author Affiliations
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Futian Li, Changchun Institute of Optics and Fine Mechanics (China)
Limin Qian, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Yueying Ma, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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