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Proceedings Paper

Experimental and analytical studies on fixed mask assembly for APS with enhanced cooling
Author(s): Tuncer M. Kuzay; Jeffrey T. Collins; Ali M. Khounsary; P. James Viccaro
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Paper Details

Date Published: 1 January 1991
PDF: 16 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23302
Show Author Affiliations
Tuncer M. Kuzay, Argonne National Lab. (United States)
Jeffrey T. Collins, Argonne National Lab. (United States)
Ali M. Khounsary, Argonne National Lab. (United States)
P. James Viccaro, Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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