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Laser-induced damage and defect analysis of calcium fluoride window caused by the high pulse repetition rate of ArF excimer laser radiation
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Paper Abstract

The lifetime of optics, especially windows, has grown to reach 100 Bpls, and its evaluation lasts for several years at least. In elementary testing (short term), focusing on each damage phenomenon must be established. The degradation of calcium fluoride windows used as laser chamber windows in ArF excimer lasers (193-nm wavelength, 30-ns pulse width, 10-mJ output energy, ~80-mJ/cm2, 6-kHz and several dozen billion pulses) is analyzed. The results of analysis such as TEM-EDX, Nomarski-type differential interference contrast (DIC) microscope, AFM, etc. is shown. The damage mechanism can be estimated from these results. Comprehensive durability evaluation becomes more efficient by creating accelerated element tests (short term).

Paper Details

Date Published: 16 November 2018
PDF: 8 pages
Proc. SPIE 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference, 108050H (16 November 2018); doi: 10.1117/12.2326657
Show Author Affiliations
Daisuke Tei, Gigaphoton Inc. (Japan)
Masakazu Hattori, Gigaphoton Inc. (Japan)
Takahito Kumazaki, Gigaphoton Inc. (Japan)
Yasutsugu Usami, Gigaphoton Inc. (Japan)
Junichi Fujimoto, Gigaphoton Inc. (Japan)
Hakaru Mizoguchi, Gigaphoton Inc. (Japan)


Published in SPIE Proceedings Vol. 10805:
Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
Christopher Wren Carr; Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M.J. Soileau, Editor(s)

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