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Proceedings Paper • Open Access • new

Microfabrication of high performance optical diaphragm by plasma ion beam etching technology
Author(s): Agnes Mestreau; Henri Bernardet; Guy Dancoing; Xavier Godechot; Christian Pezant; Vincent Stenger; Bernard Cousin; Pierre Etcheto; Georges Otrio

Paper Abstract

This paper, “Microfabrication of high performance optical diaphragm by plasma ion beam etching technology," was presented as part of International Conference on Space Optics—ICSO 1997, held in Toulouse, France.

Paper Details

Date Published: 3 April 2018
PDF: 9 pages
Proc. SPIE 10570, International Conference on Space Optics — ICSO 1997, 1057023 (3 April 2018); doi: 10.1117/12.2326629
Show Author Affiliations
Agnes Mestreau, SODERN (France)
Henri Bernardet, SODERN (France)
Guy Dancoing, SODERN (France)
Xavier Godechot, SODERN (France)
Christian Pezant, SODERN (France)
Vincent Stenger, SODERN (France)
Bernard Cousin, CNES (France)
Pierre Etcheto, CNES (France)
Georges Otrio, CNES (France)


Published in SPIE Proceedings Vol. 10570:
International Conference on Space Optics — ICSO 1997
Georges Otrio, Editor(s)

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