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Proceedings Paper

Plasmonic resonances in metal covered 2D hexagonal gratings fabricated by interference lithography
Author(s): Andrei A. Ushkov; Maxime Bichotte; Isabelle Verrier; Thomas Kampfe; Yves Jourlin
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Paper Abstract

We present both modeling and experimental results devoted to design, fabrication and characterization of metal covered hexagonal diffraction gratings. Variation of exposition and development time allow to modify the shape of the elementary cell, leaving the depth and periodicity unchanged. The fabrication process was modeled using real parameters of the lithography bench and the photoresist, substantially improving experimental results. The high quality of metal covered gratings is confirmed by excitation of plasmonic resonances, which are in a good agreement with theoretical predictions. The described approach allows to better understand plasmonic effects in 2D periodic structures and leads to an optimized design of plasmonic sensors.

Paper Details

Date Published: 19 September 2018
PDF: 6 pages
Proc. SPIE 10775, 34th European Mask and Lithography Conference, 1077516 (19 September 2018); doi: 10.1117/12.2323763
Show Author Affiliations
Andrei A. Ushkov, Univ. Lyon, UJM-Saint-Etienne, CNRS, Institut d’Optique Graduate School, Lab. Hubert Curien (France)
Maxime Bichotte, Univ. Lyon, UJM-Saint-Etienne, CNRS, Institut d’Optique Graduate School, Lab. Hubert Curien (France)
Isabelle Verrier, Univ. Lyon, UJM-Saint-Etienne, CNRS, Institut d’Optique Graduate School, Lab. Hubert Curien (France)
Thomas Kampfe, Univ. Lyon, UJM-Saint-Etienne, CNRS, Institut d’Optique Graduate School, Lab. Hubert Curien (France)
Yves Jourlin, Univ. Lyon, UJM-Saint-Etienne, CNRS, Institut d’Optique Graduate School, Lab. Hubert Curien (France)


Published in SPIE Proceedings Vol. 10775:
34th European Mask and Lithography Conference
Uwe F.W. Behringer; Jo Finders, Editor(s)

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