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Proceedings Paper

Specification and measurement of uncertainty in phase shifting Fizeau interferometry
Author(s): Brent C. Bergner
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Paper Abstract

Understanding measurement uncertainty is critical for qualifying an instrument for a specific task and for improving the instrument’s performance. Specifying that uncertainty requires a precise definition of the particular quantity being measured and the conditions under which it is measured. These should both be relevant to the end user’s application. In this paper I re-examine and summarize some of the definitions and test methods that have been used to characterize Fizeau interferometers and attempt to encourage a discussion about how to best specify the performance of Fizeau interferometers for today’s demanding applications.

Paper Details

Date Published: 18 August 2018
PDF: 10 pages
Proc. SPIE 10749, Interferometry XIX, 107490S (18 August 2018); doi: 10.1117/12.2323640
Show Author Affiliations
Brent C. Bergner, Mahr, Inc. (United States)


Published in SPIE Proceedings Vol. 10749:
Interferometry XIX
Katherine Creath; Jan Burke; Michael B. North Morris; Angela D. Davies, Editor(s)

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