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Proceedings Paper

EUV performance of a multilayer-coated high-density toroidal grating
Author(s): Ritva A. M. Keski-Kuha; Roger J. Thomas; Werner M. Neupert; Charles E. Condor; Jeffrey S. Gum
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Paper Abstract

Performance of a multilayer coated diffraction grating has been evaluated in the EUV. The application of a multilayer coating to a blazed toroidal grating of high ruling density has produced a significant enhancement in grating efficiency in the 30 run spectral region in first order and has maintained the excellent quasi stigmatic spectral resolution of the grating.

Paper Details

Date Published: 1 February 1991
PDF: 10 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23233
Show Author Affiliations
Ritva A. M. Keski-Kuha, NASA/Goddard Space Flight Ctr. (United States)
Roger J. Thomas, NASA/Goddard Space Flight Ctr. (United States)
Werner M. Neupert, NASA/Goddard Space Flight Ctr. (United States)
Charles E. Condor, NASA/Goddard Space Flight Ctr. (United States)
Jeffrey S. Gum, NASA/Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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