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Proceedings Paper

Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range
Author(s): Chantal G. Khan Malek; T. Moreno; Philippe Guerin; F. R. Ladan; Jean-Rene Rivoira; Robert J. Barchewitz
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Paper Abstract

We report on the fabrication of linear and circular reflective Bragg-Fresnel zone plates made by a multistep process using microfabrication technologies. The zone plate patterns were generated by electron beam lithography on a Mo/C triode sputtered multilayer interference mirror. The minimum zone size was 0.3 p.m wide. The pattern was transferred anisotropically into the multilayer by reactive ion etching in a fluorinated plasma. An intermediate metallic mask made by lift-off was used for the transfer process. The groove depth was monitored by following the reflectivity of the structure with a helium-neon laser during the etching process. The groove profile and dimensional control were considered.

Paper Details

Date Published: 1 February 1991
PDF: 6 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23231
Show Author Affiliations
Chantal G. Khan Malek, Lab. de Microstructures et de Microelectronique (France)
T. Moreno, Univ. Pierre et Marie Curie (France)
Philippe Guerin, Lab. de Microstructures et de Microelectronique (France)
F. R. Ladan, Lab. de Microstructures et de Microelectronique (France)
Jean-Rene Rivoira, Univ. d'Aix-Marseille III (France)
Robert J. Barchewitz, Univ. Pierre et Marie Curie (France)


Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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