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Proceedings Paper

Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon
Author(s): Tomoyoshi Motohiro
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Paper Abstract

Self-shadowing effect is elucidated as a simple means without “nanotechnology” to realize nanostructured thin films and layers in two typical prominent nanostructure effects, that is, birefringence of obliquely deposited thin films and intense visible photoluminescence of porous Si. In oblique deposition, the self-shadowing effect takes place in ballistic deposition and accumulation of materials on a vacuum / substrate interface. In porous Si, the drift diffusion of positive holes from an anode thorough Si to Si/HF solution interface causes a modified diffusion limited aggregation of positive holes which leads directly to formation of pores.

Paper Details

Date Published: 7 September 2018
PDF: 13 pages
Proc. SPIE 10731, Nanostructured Thin Films XI, 1073102 (7 September 2018); doi: 10.1117/12.2322702
Show Author Affiliations
Tomoyoshi Motohiro, Toyota Central R&D Labs., Inc. (Japan)
Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 10731:
Nanostructured Thin Films XI
Akhlesh Lakhtakia; Tom G. Mackay, Editor(s)

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