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Proceedings Paper

Laser patterning and modification of thin YBCO films
Author(s): Peter A. Atanasov; Rumen I. Tomov; Valery S. Serbezov; A. Grunchev; Lachezar A. Avramov
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Paper Abstract

Comparative study of laser patterning of YBaCuO thin films has been accomplished using XeCl, N2, Cu, CO2, and Nd:YAG lasers. Various tracks of different dimensions and shapes have been generated using a computer-controlled X-Y stage. A complete removal of the film material has been achieved. Issues relating to the limit of resolution, annealing of films, and degradation of superconducting properties are discussed for the different lasers used. The cw carbon-dioxide laser has been used for irradiation of the films thus creating 'ex situ' and 'in situ' annealed regions with different film orientation and morphology. The films have been characterized using EDAX, SEM, and RBS.

Paper Details

Date Published: 11 March 1996
PDF: 11 pages
Proc. SPIE 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics, (11 March 1996); doi: 10.1117/12.232213
Show Author Affiliations
Peter A. Atanasov, Institute of Electronics (Bulgaria)
Rumen I. Tomov, Institute of Electronics (Bulgaria)
Valery S. Serbezov, Institute of Electronics (Bulgaria)
A. Grunchev, Institute of Electronics (Bulgaria)
Lachezar A. Avramov, Institute of Electronics (Bulgaria)

Published in SPIE Proceedings Vol. 2777:
ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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