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Proceedings Paper

New developments in mass-transport fabrication for reliable high-performance integrated optoelectronic devices
Author(s): Z. L. Liau
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Paper Abstract

Current investigations of material issues in mass-transport fabrication are reviewed. Evaporation loss and resulting surface roughness have been identified and simple techniques developed for effective prevention. Photoluminescence intensity degradation and improvement were observed under different experimental conditions. Evidence of defect generation associated with high transport rate has also been observed. Extension of mass transport to GaAs-based heterostructure lasers showed considerable promise for advanced integrated siructures with high performance and improved reliability.

Paper Details

Date Published: 1 December 1992
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Proc. SPIE 1582, Integrated Optoelectronics for Communication and Processing, (1 December 1992); doi: 10.1117/12.2321801
Show Author Affiliations
Z. L. Liau, MIT Lincoln Lab. (United States)


Published in SPIE Proceedings Vol. 1582:
Integrated Optoelectronics for Communication and Processing
C.-S. Hong, Editor(s)

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