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Proceedings Paper

Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors
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Paper Abstract

We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their performance, comparing grating-based lateral shearing interferometry and Hartmann wavefront sensing. We created a compact shearing interferometer concept with a dense array of binary amplitude gratings in a single membrane to support one-dimensional wavefront measurements across a wide wavelength range without the need for longitudinal position adjustment. We find that a common scaling parameter based on wavelength and the distance to the measurement plane guides the design of both systems toward optimal sensitivity. We show preliminary results from recent experiments demonstrating one and two-dimensional wavefront sensing below the Marechal criterion.

Paper Details

Date Published: 17 September 2018
PDF: 11 pages
Proc. SPIE 10760, Advances in X-Ray/EUV Optics and Components XIII, 1076003 (17 September 2018); doi: 10.1117/12.2321642
Show Author Affiliations
Antoine Wojdyla, Lawrence Berkeley National Lab. (United States)
Diane Bryant, Lawrence Berkeley National Lab. (United States)
Weilun Chao, Lawrence Berkeley National Lab. (United States)
Lahsen Assoufid, Argonne National Lab. (United States)
Daniele Cocco, SLAC National Accelerator Lab. (United States)
Mourad Idir, Brookhaven National Lab. (United States)
Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)

Published in SPIE Proceedings Vol. 10760:
Advances in X-Ray/EUV Optics and Components XIII
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

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