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Proceedings Paper

A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings
Author(s): Sofia C. Corzo-Garcia; Muhammad Imran Afzal; Benjamin T. Kidder; Michelle A. Grigas; Ulf Griesmann
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Paper Abstract

We report on recent progress in the development of our focal plane imaging system for the detection and characterization of small fabrication errors in diffraction gratings. The instrument uses a purpose-designed high dynamic range imaging method in conjunction with a low-cost digital camera to acquire images with a dynamic range that can now exceed eight orders of magnitude. The sensitivity and utility of the instrument is demonstrated with measurements of three different diffraction gratings. Avenues for further possible improvements of the instrument are discussed.

Paper Details

Date Published: 4 September 2018
PDF: 8 pages
Proc. SPIE 10750, Reflection, Scattering, and Diffraction from Surfaces VI, 1075009 (4 September 2018); doi: 10.1117/12.2321227
Show Author Affiliations
Sofia C. Corzo-Garcia, National Institute of Standards and Technology (United States)
Muhammad Imran Afzal, Gwangju Institute of Science and Technology (United States)
Benjamin T. Kidder, The Univ. of Texas at Austin (United States)
Michelle A. Grigas, The Univ. of Texas at Austin (United States)
Ulf Griesmann, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 10750:
Reflection, Scattering, and Diffraction from Surfaces VI
Leonard M. Hanssen, Editor(s)

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