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Proceedings Paper

Spatio-temporal sampling of the coherence function for step height measurements
Author(s): Claas Falldorf; Andreas Hyra; Aleksander Simic; Ralf B. Bergmann
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Paper Abstract

We present a method for shape measurements, which is based on sampling the temporal coherence function of the light using a shear interferometer. In contrast to standard White Light Interferometry our method has low demands regarding the spatial coherence of the light and is robust with respect to exterior disturbances. We sample the coherency function of the light with the help of of a test object with steps of a couple of micrometers. Due to its common path principle the system is intrinsically vibration tolerant.

Paper Details

Date Published: 27 September 2018
PDF: 8 pages
Proc. SPIE 10749, Interferometry XIX, 107490Y (27 September 2018); doi: 10.1117/12.2321145
Show Author Affiliations
Claas Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Andreas Hyra, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Aleksander Simic, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Ralf B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)


Published in SPIE Proceedings Vol. 10749:
Interferometry XIX
Katherine Creath; Jan Burke; Michael B. North Morris; Angela D. Davies, Editor(s)

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