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Proceedings Paper

Ptychography simulations for precisely measuring wavefront profiles in soft x-ray focusing system based on ellipsoidal mirror
Author(s): Yoko Takeo; Hiroto Motoyama; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura
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Paper Abstract

In synchrotron radiation facilities, soft X-ray nanofocusing with mirrors remains a hurdle due to difficulties in mirror fabrication. We have been researching the use of ellipsoidal mirrors for soft X-ray nanofocusing. Information on the wavefront errors of focused beams is helpful for improving the focusing system. This study presents ptychographic wavefront measurements for a nanofocusing system with an ellipsoidal mirror. We developed a ptychography program and performed several simulations at 300 eV to investigate the theoretical accuracy of the wavefront measurements. The simulation results indicate that wavefront measurements with high accuracy are possible.

Paper Details

Date Published: 18 September 2018
PDF: 9 pages
Proc. SPIE 10761, Adaptive X-Ray Optics V, 107610F (18 September 2018); doi: 10.1117/12.2320961
Show Author Affiliations
Yoko Takeo, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Yasunori Senba, Japan Synchrotron Radiation Research Institute (JASRI) (Japan)
Hikaru Kishimoto, Japan Synchrotron Radiation Research Institute (JASRI) (Japan)
Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (JASRI) (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 10761:
Adaptive X-Ray Optics V
Daniele Spiga; Hidekazu Mimura, Editor(s)

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