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Proceedings Paper

3D simulation for scatter light distribution of optical surface defects
Author(s): Huiting Chai; Pengfei Zhang; Yongying Yang; Jian Bai; Yihui Zhang
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Paper Abstract

Surface defects evaluation system (SDES) works on the principle of microscopic scattering dark-field imaging (MS-DFI) and takes the criterion board as reference for calibration. Unfortunately, for criterion board with rectangular section scribed lines, image width of narrow lines doesn’t follow the linear law, making it confusing to get real width. Besides, other criterion board except with rectangular section scribed lines in a flat plane is difficult to fabricate, which limits measurement accuracy and extensive use of SDES. In this paper, a 3D simulation model is established to simulate scatter light distribution induced by surface defects. The interactions between the incident light and surface defects in near field is calculated with the help of Finite-Difference Time-Domain (FDTD) method, a kind of Maxwell’s solver. Skills as rotation and incoherent summation are applied to obtain results under illumination of unpolarized, broad-spectrum natural light sources in uniform annular layout. Finally, near to far field projections based on vector diffraction theory is carried out to get scatter light intensity distribution in far field. The data is also post-processed by scripts to describe imaging process simplified by a lens system so that it can be compared to experiment images. The 3D simulation model reveals MS-DFI process theoretically and may help to interpret image width of surface defects. The establishment of the 3D imaging model is an attempt to overcome the limits of the criterion board and is expected to provide reference for calibration for wider applications of SDES.

Paper Details

Date Published: 26 October 2018
PDF: 9 pages
Proc. SPIE 10742, Optical Manufacturing and Testing XII, 1074215 (26 October 2018); doi: 10.1117/12.2320439
Show Author Affiliations
Huiting Chai, Zhejiang Univ. (China)
Pengfei Zhang, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)
Yihui Zhang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 10742:
Optical Manufacturing and Testing XII
Ray Williamson; Dae Wook Kim; Rolf Rascher, Editor(s)

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