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Proceedings Paper

Flat microplasma UV lighting tiles: efficient VUV, UV-C, and UV-B generation for various industrial and emerging applications (Conference Presentation)
Author(s): Sung-Jin Park
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Paper Abstract

Flat UV lamps comprising large arrays of microcavity plasmas, and capable of efficiently generating in the wavelength from VUV to UV-B radiation, have been developed by the team of University of Illinois and Eden Park Illumination. UV light is desirable for a number of chemical processes and disinfection methods available commercially but conventional UV light sources suffer from several drawbacks, including undesirable form factors and operational concerns regarding the use of mercury. Microplasmas are non-equilibrium, low-temperature plasma sources which have high power loading (several hundred kW/cm3), thereby enabling them to efficiently form UV-generating excimer molecules. This work has focused on leveraging microplasma array technology to realize low-temperature UV lamps that are flat and designed to have a scalable, slim form factor (total thickness less than ~5 mm). Each microcavity (less than a sub-millimeters in its cross-sectional dimensions) was fabricated through a series of microfabrication techniques, and the spatial variation of the electric field strength in each microcavity was tailored through the cavity cross-section and electrode geometry to efficiently generate deep UV radiation. UV light tiles capable of producing fluences up to 200 mW/cm2 at 172 nm which generates more than 25 watts of average power from a lamp of only 16 square inches in active surface area. Details concerning lamp performance of UV lamps having emitting wavelengths specifically in 146, 172, 222, and 308 nm will be discussed. The potential applications of the microplasma UV lighting tiles such as photochemistry, semiconductor processes, environmental and biomedical applications will be discussed.

Paper Details

Date Published: 17 September 2018
Proc. SPIE 10727, UV and Higher Energy Photonics: From Materials to Applications 2018, 107270L (17 September 2018); doi: 10.1117/12.2320250
Show Author Affiliations
Sung-Jin Park, Univ. of Illinois (United States)

Published in SPIE Proceedings Vol. 10727:
UV and Higher Energy Photonics: From Materials to Applications 2018
Gilles Lérondel; Satoshi Kawata; Yong-Hoon Cho, Editor(s)

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