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Proceedings Paper

Ultraprecise scanning technology
Author(s): Frits Zernike; Daniel N. Galburt
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Paper Abstract

The extension of present step and scan technology to EUV projection techniques to print patterns with .ljim feature sizes is examined.

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23196
Show Author Affiliations
Frits Zernike, SVGL (Netherlands)
Daniel N. Galburt, SVGL (United States)


Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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