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Applications of optical coherence in interferometric metrology
Author(s): Peter J. de Groot
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Paper Abstract

Limited light source coherence can be both a complication and a benefit to interferometric optical metrology. Although high-coherence lasers are great for displacement measuring interferometry, holography, and Fizeau interferometry, many instruments rely on low coherence as part of the measurement principle. Examples include systems that separate parallel surfaces of transparent parts, coherence scanning interferometers for surface topography, and coupled-cavity fiber position sensors. In cases where high coherence is essential, there can nonetheless be a benefit to synthesizing reduced coherence to suppressing spurious fringes, coherent noise, and unwanted speckle.

Paper Details

Date Published: 7 September 2018
PDF: 5 pages
Proc. SPIE 10834, Speckle 2018: VII International Conference on Speckle Metrology, 108340S (7 September 2018); doi: 10.1117/12.2319106
Show Author Affiliations
Peter J. de Groot, Zygo Corporation (United States)


Published in SPIE Proceedings Vol. 10834:
Speckle 2018: VII International Conference on Speckle Metrology
Malgorzata Kujawińska; Leszek R. Jaroszewicz, Editor(s)

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