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Proceedings Paper

On the metrology of the MSF errors
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Paper Abstract

The aim of our research is to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after all manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. In this paper we describe some middle spatial frequency errors, which occur during grinding. As there are limited possibilities to measure ground surfaces, their analysis from the point of measurement is most difficult. Therefore, it is of utmost importance to optimally organize the measurement guaranteeing sufficient data for the reconstruction of the toolpath and avoidance of aliasing effects. In the paper discuss possible classifications and some difficulties during measuring of grinded surfaces.

Paper Details

Date Published: 7 August 2018
PDF: 6 pages
Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 108290F (7 August 2018); doi: 10.1117/12.2318675
Show Author Affiliations
Olga Kukso, Deggendorf Institute of Technology (Germany)
Rolf Rascher, Deggendorf Institute of Technology (Germany)
Rainer Börret, Aalen Univ. of Applied Sciences (Germany)
Mario Pohl, Aalen Univ. of Applied Sciences (Germany)

Published in SPIE Proceedings Vol. 10829:
Fifth European Seminar on Precision Optics Manufacturing
Rolf Rascher; Christian Schopf, Editor(s)

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