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Proceedings Paper

Design considerations for multilayer-coated Schwarzchild objectives for the XUV
Author(s): Jeffrey B. Kortright; James H. Underwood
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Paper Abstract

The performance of multilayer-coated Schwarzschild objectives, and similar near normal incidence soft xray focussing systems, can be affected by the changing angles of incidence for different rays and possible variations in multilayer period across the curved mirror surfaces. A design analysis which considers these issues is presented, using as an example a 20 times demagnifying Schwarzschild objective coated with molybdenum/silicon multilayers for operation at roughly 76 eV. The large bandwidth of these multi].ayers eases requirements on control of the variation of the d-spacing for the system considered. Implications for extension to similar systems operating with different magnifications, sizes, and photon energies are discussed.

Paper Details

Date Published: 1 February 1991
PDF: 9 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23182
Show Author Affiliations
Jeffrey B. Kortright, Lawrence Berkeley Lab. (United States)
James H. Underwood, Lawrence Berkeley Lab. (United States)


Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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