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Proceedings Paper

Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry
Author(s): Y. Arai
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Paper Abstract

Speckle interferometry is generally known as a method that measures the deformation on an object with rough surfaces. In this paper, a three-dimensional (3-D) shape-measurement method is proposed for superfine structures beyond the diffraction limit using the basic feature of speckle interferometry. Because the differential coefficient distribution of the shape of such an object can be detected by giving a known lateral shift to the measured object in speckle interferometry, the shape can be reconstructed by integrating the differential coefficient distribution. Based on experimental results obtained using diffraction gratings as measured objects, it is confirmed that the proposed method can measure 3-D shapes that are beyond the diffraction limit of the lens.

Paper Details

Date Published: 18 August 2018
PDF: 8 pages
Proc. SPIE 10749, Interferometry XIX, 1074902 (18 August 2018); doi: 10.1117/12.2318040
Show Author Affiliations
Y. Arai, Kansai Univ. (Japan)

Published in SPIE Proceedings Vol. 10749:
Interferometry XIX
Katherine Creath; Jan Burke; Michael B. North Morris; Angela D. Davies, Editor(s)

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