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Proceedings Paper

Fabrication of a 3D nano-printing device
Author(s): Jinseo Hong; Yusuke Masuda; Takashi Mineta
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Paper Abstract

In this paper, we demonstrate fabrication processes of dual atomic force microscopic (AFM) probe with embedded micro-channels and a nozzle hole for liquid delivering function for 3D printing in nano-scale. The nozzle and embedded micro-channels were successfully fabricated with under-surface connection and hydrophilic inner walls. The narrow trench opening remained above the micro-channel, was completely sealed by combination of Si thermal oxidation and subsequent SiO2 sputtering deposition. Twin Si tips with an outlet nozzle hole and embedded micro-channel were fabricated with the developed fabrication process.

Paper Details

Date Published: 23 March 2018
PDF: 6 pages
Proc. SPIE 10597, Nano-, Bio-, Info-Tech Sensors, and 3D Systems II, 105971A (23 March 2018); doi: 10.1117/12.2317917
Show Author Affiliations
Jinseo Hong, Yamagata Univ. (Japan)
Yusuke Masuda, Yamagata Univ. (Japan)
Takashi Mineta, Yamagata Univ. (Japan)

Published in SPIE Proceedings Vol. 10597:
Nano-, Bio-, Info-Tech Sensors, and 3D Systems II
Vijay K. Varadan, Editor(s)

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