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Toward “defect-free” optics: a pioneering comprehensive metrology method
Author(s): Jianda Shao; Jian Chen; Shijie Liu; Yuanan Zhao; Meiping Zhu; Kaizao Ni; Liang Ma; Wencai Li; Ming Huang
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Paper Abstract

In this paper, the concept of a mesoscopic method with high-speed and high-sensitivity is proposed for characterization of surface defects for large optics. The technology is a comprehensive integration of laser scattering method and highly sensitive photothermal method. The principle, experimental setup and preliminary measurement results are presented in detail in the paper. A statistical model for evaluation of mapping results of defects is also proposed to show the effectiveness of the comprehensive metrology method. The proposed method can detect non-destructively surface defects with high-speed and high-sensitivity at the mesoscopical level. It is a promising novel tool for mapping defects in meter size optics and hence it can provide clues to eliminate defects during the manufacturing processes and march toward “defect-free” optics.

Paper Details

Date Published: 16 May 2018
PDF: 14 pages
Proc. SPIE 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers, 1071304 (16 May 2018); doi: 10.1117/12.2317763
Show Author Affiliations
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Jian Chen, Anhui Province Key Lab. of Non-Destructive Evaluation (China)
ZC Optoelectronic Technologies Ltd. (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Meiping Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Kaizao Ni, Shanghai Institute of Optics and Fine Mechanics (China)
Liang Ma, Anhui Province Key Lab. of Non-Destructive Evaluation (China)
ZC Optoelectronic Technologies Ltd. (China)
Wencai Li, Anhui Province Key Lab. of Non-Destructive Evaluation (China)
ZC Optoelectronic Technologies Ltd. (China)
Ming Huang, Anhui Province Key Lab. of Non-Destructive Evaluation (China)
ZC Optoelectronic Technologies Ltd. (China)


Published in SPIE Proceedings Vol. 10713:
Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers
Takahisa Jitsuno; Jianda Shao; Wolfgang Rudolph, Editor(s)

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