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In-situ shape measurement technology during large aperture optical planar continuous polishing process
Author(s): Ruiqing Xie; Defeng Liao; Jian Chen; Shijie Zhao; Xianhua Chen; Baojian Ji; Jian Wang; Qiao Xu
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Paper Abstract

Continuous polishing technology is an important means to realize batch processing of large aperture and high precision planar optical components. However, traditional continuous polishing process largely depends on the operator's experience, with poor controllability of component surface figure and unstable processing efficiency. In order to solve this problem, the in-situ shape measurement technologies including measurement of pitch lap surface figure and workpiece surface figure have been proposed in this paper. The real-time states of the pitch lap flatness and the workpiece surface figure in polishing process are obtained by in-situ measurement technologies, which provide the quantitative informations for adjusting process parameters. In the experiment, a large aperture mirror (material as K9; size as 800mm×400mm×100mm) was polished. The results show that the surface figure of the component was improved from λ/2 (1λ=632.8nm) to λ/6 by using the in-situ measurement technologies during the continous polishing process.

Paper Details

Date Published: 5 March 2018
PDF: 6 pages
Proc. SPIE 10710, Young Scientists Forum 2017, 1071033 (5 March 2018); doi: 10.1117/12.2317629
Show Author Affiliations
Ruiqing Xie, Chengdu Fine Optical Engineering Research Ctr. (China)
Xi′an Jiaotong Univ. (China)
Defeng Liao, Chengdu Fine Optical Engineering Research Ctr. (China)
Harbin Institute of Technology (China)
Jian Chen, Shanghai Jing Optics and Mechanics Co., Ltd. (China)
Shijie Zhao, Chengdu Fine Optical Engineering Research Ctr. (China)
Xianhua Chen, Chengdu Fine Optical Engineering Research Ctr. (China)
Baojian Ji, Chengdu Fine Optical Engineering Research Ctr. (China)
Jian Wang, Chengdu Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 10710:
Young Scientists Forum 2017
Songlin Zhuang; Junhao Chu; Jian-Wei Pan, Editor(s)

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