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Electron beam addressable potentiometric sensor for ion distribution imaging with high resolution
Author(s): Wataru Inami; Kiyohisa Nii; Satoru Shibano; Yoshimasa Kawata
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Paper Abstract

We have developed an electron beam addressable potentiometric sensor to improve the spatial resolution. Ion sensors are widely used in the fields of medical and life science, food and material development, environmental protection and so on. However, the spatial resolution of the ion distribution imaging sensor is limited by the diffraction limit of light or microfabrication technology. So, we proposed an addressable potentiometric sensor using a focused electron beam instead of light. The electron beam can be easily focused to a spot of several nanometer, and the spatial resolution of the addressable potentiometric sensor improved. We showed that ion concentration can be measured by irradiating the ion sensor substrate (SiN/SiO2/Si) with a focused electron beam.

Paper Details

Date Published: 24 April 2018
PDF: 2 pages
Proc. SPIE 10711, Biomedical Imaging and Sensing Conference, 1071123 (24 April 2018); doi: 10.1117/12.2316938
Show Author Affiliations
Wataru Inami, Shizuoka Univ. (Japan)
Kiyohisa Nii, Shizuoka Univ. (Japan)
Satoru Shibano, Shizuoka Univ. (Japan)
Yoshimasa Kawata, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 10711:
Biomedical Imaging and Sensing Conference
Toyohiko Yatagai; Yoshihisa Aizu; Osamu Matoba; Yasuhiro Awatsuji; Yuan Luo, Editor(s)

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