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Quasi-CW laser-induced damage of indium tin oxide films and polyimide films at 1064 nm wavelength
Author(s): Liping Peng; Yuan'an Zhao; Xiaofeng Liu; Yonggang Liu; Zhaoliang Cao; Meiping Zhu; Jianda Shao
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Paper Abstract

Quasi-CW laser damage behaviors of indium tin oxide (ITO) single-layer and polyimide (PI) on ITO bi-layer were investigated. The ITO single-layer with thickness of 25nm was deposited on fused silica substrate by magnetron sputtering, and the PI/ITO bi-layer was prepared by spin coating 80nm PI film on the 25nm ITO single-layer. Single-shot, with radiation time of 120 seconds, laser induced damage threshold (LIDT) of the samples were determined according to ISO 21254. The damage morphologies were mapped by optical profiler. It showed interesting phenomena that the PI top layer increased LIDT of the sample. The typical damage morphologies were blisters, and the height of the blisters increased as the laser power density increases. The formation and evolution of the blisters were analyzed.

Paper Details

Date Published: 16 May 2018
PDF: 7 pages
Proc. SPIE 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers, 107131M (16 May 2018); doi: 10.1117/12.2316410
Show Author Affiliations
Liping Peng, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yuan'an Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xiaofeng Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yonggang Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Zhaoliang Cao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Meiping Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 10713:
Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers
Takahisa Jitsuno; Jianda Shao; Wolfgang Rudolph, Editor(s)

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