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Proceedings Paper

Mo-Si multilayer as soft x-ray mirrors for the wavelengths around 20 nm region
Author(s): Dong-Eon Kim
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Paper Abstract

Molybdenum-silicon multilayer soft x-ray mirrors have been fabricated using a magnetron sputtering system. Their structures have been characterized by x-ray diffraction (XRD) and reflectivities at normal incidence have been measured by using monochromatized synchrotron radiation in the 18-24 nm region. A normal incidence reflectivity as high as 40% at 20.8 nm was achieved.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778GM (1 September 1996); doi: 10.1117/12.2316287
Show Author Affiliations
Dong-Eon Kim, Pohang Univ. of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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