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Proceedings Paper

Magnification and object size dependent resolution behavior of the axially symmetric aspherized four-mirror system at soft x-ray wavelength
Author(s): Cheon Seog Rim
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Paper Abstract

A research is conducted on the axially symmetric four-mirror system for soft X-ray (λ=13nm) projection lithography. As the four-spherical mirror system has 8 design-parameters (4 curvatures and 4 distances), but having 7 constraints1 from nearly zero third-order aberrations2jV=I∣Sj∣<10-6), a given reduction magnification, and scaling factor(c1=-1), the number of the remaining free design-parameter is one, for instance, d0 (the distance of object to the first mirror surface) in this work.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778GC (1 September 1996); doi: 10.1117/12.2316277
Show Author Affiliations
Cheon Seog Rim, Korea Advanced Institute of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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