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Proceedings Paper

Phase compensation in phase shifting interferometry
Author(s): Katsuyuki Okada
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Paper Abstract

Phase shifting technique is widely used in interferometry, but one drawback of the technique is necessity of exact phase shift value, and the error of the phase value causes severe error in phase calculation.

We have reported a method to obtain the exact value of the phase shift and the phase distribution of the wavefront from phase shifted interferograms without additional information1,2). In the technique, the amount of the phase shift is estimated from all the interferograms with different amount of phase shift by a nonlinear least square estimation. To obtain the phases, an iterative calculation is used because of large number of unknowns of the equations. In this paper, the convergence of the estimation is examined as a function of the number of interferograms used for measurement and of the amount of total phase shift.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FZ (1 September 1996); doi: 10.1117/12.2316264
Show Author Affiliations
Katsuyuki Okada, Chiba Univ. (Japan)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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