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Proceedings Paper

Large field of view surface microstructure measurements
Author(s): James C. Wyant
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Paper Abstract

This paper describes a computerized interferometric microscope system for the measurement of surface microstructure in which high spatial resolution, small field of view (FOV), measurements of surface microstructure are stitched together to give highly accurate large FOV maps of surface microstructure. A FOV of several millimeters having micron spatial resolution and nanometer or better height resolution can be obtained.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FY (1 September 1996); doi: 10.1117/12.2316263
Show Author Affiliations
James C. Wyant, WYKO Corp. (United States)
Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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