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Proceedings Paper

In-process measurement of concave mirror by fiber grating line-Hartmann test
Author(s): Tsuguo Kohno
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Paper Abstract

A new Hartmann test method is developed using a single optical fiber grating and a rotating spindle instead of using clossed fiber grating sheets. Being illuminated with laser light, the fiber grating generates one-plane fan-like diverging multiple rays of almost same intensities. Reflected rays from the mirror surface under test are converging to make straight multi-spot pattern. A CCD camera detects the pattern and a personal computer analyzes it into sectional figure error. For the workpiece on a rotating spindle, several measurements are carried out synchronously to the deferent turning angles, and these sectional figures are synthesized into a three dimensional figure error map. Experiments of on-machine measurement showed it as a stable measurement method of about 1/10λ accuracy and confirmed to be applicable to in-process measurement for machining control.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FQ (1 September 1996); doi: 10.1117/12.2316255
Show Author Affiliations
Tsuguo Kohno, Tokyo Metropolitan Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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