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Proceedings Paper

Precise measurement of linear displacement by moire fringes of elongated circular gratings
Author(s): Jong Sup Song
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Paper Abstract

Moiré fringes of elongated circular gratings to precisely measure the linear displacements are presented. The moving direction of a grating can be easily determined and the moving displacement can be measured within the accuracy of 1/10 pitch of the grating by using moiré fringes of elongated circular gratings.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778F4 (1 September 1996); doi: 10.1117/12.2316233
Show Author Affiliations
Jong Sup Song, Hannam Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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