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Proceedings Paper

Novel heterodyne interferometer for measuring displacement
Author(s): Yong-jun Wu
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Paper Abstract

A novel heterodyne interferometer with a laser diode for measuring displacement is proposed. The heterodyne carrier signal is created by using an acousto-optic modulator. The back surface of a λ/4 plate serves as the reference mirror. These make the interferometer have very simple construction. The displacement is obtained by measuring the phase difference between the measurement signal and reference signal.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778F1 (1 September 1996); doi: 10.1117/12.2316230
Show Author Affiliations
Yong-jun Wu, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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