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Proceedings Paper

Characteristic measurement of surface acoustic wave using a heterodyne interferometer
Author(s): Suezou Nakadate
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Paper Abstract

A new method for measuring a wavelength and standing wave ratio of a surface acoustic wave(SAW) is presented, which is based on a heterodyne interferometer using first-order diffracted light beams from a SAW device and a grating. Phase and amplitude distributions of a beat signal from the interferometer by moving the substrate or the grating give such characteristics of the SAW. Experimental verifications are presented in two cases of the movements of the object and grating. Two-dimensional measurements around an interdigital transducer of a SAW device are also given.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778EG (1 September 1996); doi: 10.1117/12.2316209
Show Author Affiliations
Suezou Nakadate, Tokyo Institute of Polytechnics (Japan)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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