Share Email Print
cover

Proceedings Paper

Lateral shearing interferometry with high accuracy
Author(s): G. W. R. Leibbrandt
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A phase-stepped lateral shearing interferometer is presented with the same accuracy as conventional interferometers. This is achieved among others by shearing over a substantial fraction of the wavefront diameter.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778EE (1 September 1996); doi: 10.1117/12.2316207
Show Author Affiliations
G. W. R. Leibbrandt, Philips Research Labs. (Netherlands)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

© SPIE. Terms of Use
Back to Top