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Proceedings Paper

XeCl excimer laser with high repetition rate and low divergence beam
Author(s): Yingzi Nan
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Paper Abstract

Configuration and performance of a high repetition rate XeCl excimer laser are reported. The laser maximum output energy is 415 mJ. Maximum average power is 35 W at repetition rate of 110 Hz. When unstable resonator optics are adopted on the laser. Beam divergence are improved about 10 times but expense of output energy in 30%.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27789X (1 September 1996); doi: 10.1117/12.2316046
Show Author Affiliations
Yingzi Nan, Chang Chun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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