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Testing and characterization of deformable mirrors
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Paper Abstract

Deformable mirrors are at the heart of any adaptive optics system. We present the results of tests of deformable mirrors from Microscale. One of the key innovations of these deformable mirrors is that the facesheet is created from a silicon on insulator (SOI) wafer with integral posts for mechanical linkage to the actuators. This dramat- ically reduces the variability of the influence function. The facesheet is bonded to an array of piezoelectric stack actuators. The actuators are currently PZT, but single crystal PMN actuators are being developed. We present results of optical and electrical tests of the performance of the DM.

Paper Details

Date Published: 11 July 2018
PDF: 6 pages
Proc. SPIE 10703, Adaptive Optics Systems VI, 1070375 (11 July 2018); doi: 10.1117/12.2314296
Show Author Affiliations
Lewis C. Roberts, Jet Propulsion Lab. (United States)
Camilo Mejia Prada, Jet Propulsion Lab. (United States)
J. Chris Shelton, Jet Propulsion Lab. (United States)
Seth R. Meeker, Jet Propulsion Lab. (United States)
Li Yao, Microscale, Inc. (United States)
Yuqian Wu, Microscale, Inc. (United States)
Xingtao Wu, Microscale, Inc. (United States)

Published in SPIE Proceedings Vol. 10703:
Adaptive Optics Systems VI
Laird M. Close; Laura Schreiber; Dirk Schmidt, Editor(s)

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