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Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings
Author(s): Jennifer Rebellato; Evgueni Meltchakov; Regina Soufli; Sébastien De Rossi; Xueyan Zhang; Frédéric Auchère; Franck Delmotte
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Paper Abstract

The thin film optical constants are key parameters to carry out optical simulation or optimization of multilayer mirrors with high efficiency. However, for most materials, different sets of optical constants can be found in the literature especially in the EUV range, as these parameters are not as well-known in the EUV as in the visible or wavelength range. In this work, we have used several reflectance and transmittance measurements in the wavelength range from 10 nm to 60 nm. Different optical constant files have been tested and compared with the IMD simulation software. We will present some experimental spectra and theoretical simulations to highlight the existing problem on the reliability of optical constants sets and to discuss potential solutions. We focus our research on a few materials of particular interest in the EUV range such as aluminum, aluminum oxide, molybdenum, zirconium, magnesium, silicon carbide, and boron carbide. These analyses lead us to select the most reliable and accurate optical constants set, or to create the best one from the concatenation of existing data for each material of interest.

Paper Details

Date Published: 5 June 2018
PDF: 16 pages
Proc. SPIE 10691, Advances in Optical Thin Films VI, 106911U (5 June 2018); doi: 10.1117/12.2313346
Show Author Affiliations
Jennifer Rebellato, Lab. Charles Fabry, CNRS, Univ. Paris-Saclay (France)
Ctr. National d'Études Spatiales (France)
Evgueni Meltchakov, Lab. Charles Fabry, CNRS, Univ. Paris-Saclay (France)
Regina Soufli, Lab. Charles Fabry, CNRS, Univ. Paris-Saclay (France)
Lawrence Livermore National Lab. (United States)
Sébastien De Rossi, Lab. Charles Fabry, CNRS, Univ. Paris-Saclay (France)
Xueyan Zhang, Institut d’Astrophysique Spatiale, CNRS, Univ. Paris-Saclay (France)
Frédéric Auchère, Institut d’Astrophysique Spatiale, CNRS, Univ. Paris-Saclay (France)
Franck Delmotte, Lab. Charles Fabry, CNRS, Univ. Paris-Saclay (France)


Published in SPIE Proceedings Vol. 10691:
Advances in Optical Thin Films VI
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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