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Proceedings Paper • new

Ion beam figuring of highly steep mirrors with a 5-axis hybrid machine tool
Author(s): Xiaolin Yin; Wa Tang; Haixiang Hu; Xuefeng Zeng; Dekang Wang; Donglin Xue; Feng Zhang; Weijie Deng; Xuejun Zhang
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Paper Abstract

Ion beam figuring (IBF) is an advanced and deterministic method for optical mirror surface processing. The removal function of IBF varies with the different incident angles of ion beam. Therefore, for the curved surface especially the highly steep one, the Ion Beam Source (IBS) should be equipped with 5-axis machining capability to remove the material along the normal direction of the mirror surface, so as to ensure the stability of the removal function. Based on the 3-RPS parallel mechanism and two dimensional displacement platform, a new type of 5-axis hybrid machine tool for IBF is presented. With the hybrid machine tool, the figuring process of a highly steep fused silica spherical mirror is introduced. The R/# of the mirror is 0.96 and the aperture is 104mm. The figuring result shows that, PV value of the mirror surface error is converged from 121.1nm to32.3nm, and RMS value 23.6nm to 3.4nm.

Paper Details

Date Published: 20 February 2018
PDF: 6 pages
Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106974R (20 February 2018); doi: 10.1117/12.2312333
Show Author Affiliations
Xiaolin Yin, CIOMP (China)
Wa Tang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Haixiang Hu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xuefeng Zeng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Dekang Wang, Univ. of Chinese Academy of Sciences (China)
Donglin Xue, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Feng Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Weijie Deng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xuejun Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 10697:
Fourth Seminar on Novel Optoelectronic Detection Technology and Application
Weiqi Jin; Ye Li, Editor(s)

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