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Micro Glass Blowing platform for microfabrication of microoptical components
Author(s): C. Gorecki; J. Vincente Carrion; N. Passilly; S. Bargiel
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Paper Abstract

The specific conical shape of the axicon makes them well suited for the generation of so-called Bessel beams. We present here a technological micro-glass blowing platform developed for miniaturization of micro-optical components. This employs the glass-blowing process, silicon micromachining and heterogeneous bonding. Here, we focus on the unconventional fabrication methods of micro-optical components in borosilicate glass. As an example, an original concept of a micro-machined micro-axicons for generation of Bessel beams is demonstrated and experimentally validated.

Paper Details

Date Published: 24 May 2018
PDF: 5 pages
Proc. SPIE 10678, Optical Micro- and Nanometrology VII, 1067814 (24 May 2018); doi: 10.1117/12.2311305
Show Author Affiliations
C. Gorecki, FEMTO-ST Institute, Univ. de Bourgogne Franche-Comté (France)
J. Vincente Carrion, FEMTO-ST Institute, Univ. de Bourgogne Franche-Comté (France)
N. Passilly, FEMTO-ST Institute, Univ. de Bourgogne Franche-Comté (France)
S. Bargiel, FEMTO-ST Institute, Univ. de Bourgogne Franche-Comté (France)

Published in SPIE Proceedings Vol. 10678:
Optical Micro- and Nanometrology VII
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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