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Proceedings Paper

Surface profilometry in the spectral domain
Author(s): Jose E. Calatroni; Carmen Sainz; Antonio L. Guerrero; Rafael A. Escalona Z.
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Paper Abstract

Spectrally resolved white light interferometry (SRWLI) is applied to 1-D profilometry. The technique allows us to deal with discontinuous profiles without any ambiguity. Experimental results show good agreement with phase shifting profilometry; nanometric resolution is attained. In order to extend the method to 2-D samples, double spectral modulation (DSM) is applied using a new experimental set-up which enhances luminosity.

Paper Details

Date Published: 5 February 1996
PDF: 4 pages
Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); doi: 10.1117/12.231099
Show Author Affiliations
Jose E. Calatroni, Univ. Simon Bolivar (Venezuela)
Carmen Sainz, Univ. Metropolitana (Venezuela)
Antonio L. Guerrero, Univ. Simon Bolivar (Venezuela)
Rafael A. Escalona Z., Univ. Simon Bolivar (Venezuela)

Published in SPIE Proceedings Vol. 2730:
Second Iberoamerican Meeting on Optics
Daniel Malacara-Hernandez; Sofia E. Acosta-Ortiz; Ramon Rodriguez-Vera; Zacarias Malacara; Arquimedes A. Morales, Editor(s)

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