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Proceedings Paper

Surface evaluation combining the moire effect and phase-stepping techniques in Fizeau interferometry
Author(s): Benito Vasquez Dorrio; Jesus Blanco-Garcia; Angel F. Doval; Jose Carlos Lopez Vazquez; R. Soto; J. Bugarin; J. L. Fernandez; Mariano Perez-Amor
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Paper Abstract

The usual phase-stepping algorithms are employed to evaluate the phase of Fizeau interferograms in topographic measurements. The superposition of the interferogram with a Ronchi grid provides a Moire pattern. The phase modulation is obtained by the in plane displacement of the grid, while a sinusoidal intensity pattern is obtained by defocusing the image acquisition system. In this work, the measurement range of the method in the function of the maximum variation of height surfaces is calculated and verified.

Paper Details

Date Published: 5 February 1996
PDF: 4 pages
Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); doi: 10.1117/12.231093
Show Author Affiliations
Benito Vasquez Dorrio, Univ. de Vigo (Spain)
Jesus Blanco-Garcia, Univ. de Vigo (Spain)
Angel F. Doval, Univ. de Vigo (Spain)
Jose Carlos Lopez Vazquez, Univ. de Vigo (Spain)
R. Soto, Univ. de Vigo (Spain)
J. Bugarin, Univ. de Vigo (Spain)
J. L. Fernandez, Univ. de Vigo (Spain)
Mariano Perez-Amor, Univ. de Vigo (Spain)

Published in SPIE Proceedings Vol. 2730:
Second Iberoamerican Meeting on Optics
Daniel Malacara-Hernandez; Sofia E. Acosta-Ortiz; Ramon Rodriguez-Vera; Zacarias Malacara; Arquimedes A. Morales, Editor(s)

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