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Proceedings Paper

High-resolution multigas sensors based on solid state resonant cavities
Author(s): Fernando Lopez; Jesus Meneses; Juan Melendez; Antonio J. de Castro; Angel Munoz
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Paper Abstract

A new sensor is proposed combining arrays of interference filters with resonant cavities of high interference order (Fabry-Perot resonators) using both, high capabilities of accurate thickness control in silicon substrates derived from microelectronics and thin-film optics techniques. The interest of this type of device would be the fabrication of high resolution multigas sensors, compact, with no moving parts, for accurate measurement of low concentration gases.

Paper Details

Date Published: 5 February 1996
PDF: 4 pages
Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); doi: 10.1117/12.231021
Show Author Affiliations
Fernando Lopez, Univ. Carlos III de Madrid (Spain)
Jesus Meneses, Univ. Carlos III de Madrid (Spain)
Juan Melendez, Univ. Carlos III de Madrid (Spain)
Antonio J. de Castro, Univ. Carlos III de Madrid (Spain)
Angel Munoz, Univ. Carlos III de Madrid (Spain)


Published in SPIE Proceedings Vol. 2730:
Second Iberoamerican Meeting on Optics
Daniel Malacara-Hernandez; Sofia E. Acosta-Ortiz; Ramon Rodriguez-Vera; Zacarias Malacara; Arquimedes A. Morales, Editor(s)

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