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Motion-induced error compensation for 3D shape measurement with phase shifting technique
Author(s): Ziping Liu; Song Zhang
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Paper Abstract

This paper proposes a motion compensation method to reduce the motion-induced error in phase shifting pro-filometry. We first estimate the motion of an object from the difference between two subsequent 3D frames. After that, by taking the advantage of projector's pinhole model, we can determine the motion-induced phase shifting error from the estimated motion. A generic three-step phase-shifting algorithm considering phase shift error is then utilized to compute the phase. We have conducted quantitative experiments to demonstrate that the proposed algorithm can effectively improve the measurement accuracy without additional information or further constraints.

Paper Details

Date Published: 14 May 2018
PDF: 6 pages
Proc. SPIE 10667, Dimensional Optical Metrology and Inspection for Practical Applications VII, 1066707 (14 May 2018); doi: 10.1117/12.2309576
Show Author Affiliations
Ziping Liu, Purdue Univ. (United States)
Song Zhang, Purdue Univ. (United States)

Published in SPIE Proceedings Vol. 10667:
Dimensional Optical Metrology and Inspection for Practical Applications VII
Kevin G. Harding; Song Zhang, Editor(s)

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