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Proceedings Paper

Performance of the new type of general purpose airborne particle counter designed and developed in KFKI
Author(s): A. Czitrovszky
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Paper Abstract

We discuss the design and estimated accuracy of a multi-axis Michelson-type heterodyne interferometer system with the following main technical data: nominal system resolution 1.25nm, measuring distance 20m, maximum sampling rate 60kHz. We show that the accuracy associated with the data acquisition system is better than ±10nm+0.1ppm within the velocity range of ±1.8m/s and acceleration range of ±9900 m/s2 . Effects of the optical frequency cross talk due to non ideal beam separation, which limits the measurement accuracy are considered.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BK (23 July 1993); doi: 10.1117/12.2308835
Show Author Affiliations
A. Czitrovszky, Central Research Institute for Physics (Hungary)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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