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Proceedings Paper

FMCW absolute distance measurement by using external-cavity semiconductor laser
Author(s): Yougjun Wu
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Paper Abstract

The optical system of a He-Cd laser based, scanning laser pattern generator (SLPG) is described together with some design principles. The reticle to be exposed is moved on a X-Y air cushion bed, and the computer controlled system is capable to expose reticles of 100x100 mm size on a 2 µin raster grid in less than 90 minutes.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BC (23 July 1993); doi: 10.1117/12.2308827
Show Author Affiliations
Yougjun Wu, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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