Share Email Print
cover

Proceedings Paper

Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating
Author(s): Kenichi Hibino
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Elastic scattering of light reflects an inhomogeneous interface between two media. Applied to surfaces the technique is sensitive to roughness levels in the sub-Angstrom region. This makes it an excellent tool for studying minute changes in the surface structure while processing materials. Examples are given of real-time total integrated scattering applied to stress analysis of metallization films and monitoring of thermal stability of silicides.

Paper Details

Date Published: 23 July 1993
PDF: 2 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B5 (23 July 1993); doi: 10.1117/12.2308820
Show Author Affiliations
Kenichi Hibino, CSIRO (Australia)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

© SPIE. Terms of Use
Back to Top