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Proceedings Paper

Expert system for automatic optical flatness standard measurement
Author(s): Leszek Salbut
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Paper Abstract

This paper proposes a method to obtain the shape of large plane surfaces by connecting measured phase distributions by a small aperture interferometer. To correct tilt and vertical displacement of individual phase distributions, measurements are made so that areas of the measurement have common area with the adjacent areas and then these are connected by minimizing squared difference in the common areas. An experimental result of connection is also shown.

Paper Details

Date Published: 23 July 1993
PDF: 3 pages
Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B1 (23 July 1993); doi: 10.1117/12.2308816
Show Author Affiliations
Leszek Salbut, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 1983:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Gyorgy Akos; Tivadar Lippenyi; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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